Industrial Screw Vacuum Pump Oil Free High Efficiency Vacuum Pump for Semiconductor & Chemical Industry
Oil-Injected & Oil-Free Screw Vacuum Pumps
Overview
Our advanced screw vacuum pump series delivers unparalleled performance across a wide spectrum of industrial applications. Engineered with intelligent control systems, optimized oil separation technology, and high-efficiency drive components, these pumps offer exceptional energy savings, reliable operation, and extended service life. Available in both oil-injected and oil-free configurations, they provide flexible solutions for food packaging, chemical processing, electronics manufacturing, and environmental technology.
Key Features & Benefits
| Feature | Benefit |
|---|---|
| Smart Control System | Up to 50% energy savings, peak current elimination, 97.5% efficiency |
| Optimized Oil Separator | Patented 3-stage separation, longer life, easier maintenance |
| Cold/Hot Section Arrangement | Prevents steam coagulation, extends electrical component life |
| Variable-frequency Cooling Fan | Low noise, superior cooling, additional energy savings |
| Special IR Motor | Rotex coupling, Class F insulation, oversized bearings for reliability |
| High-Quality Airend | High flow rate, smooth running, low vibration |
Technical Specifications
Oil-Injected Screw Vacuum Pumps
| Model | Power (kW) | Flow (m³/h) | Ultimate Vacuum (mbar a) | Inlet/Outlet |
|---|---|---|---|---|
| VPO-5.5PM | 5.5 | 413 | 0.35 | DN80/DN65 |
| VPO-7.5PM | 7.5 | 570 | 0.35 | DN80/DN65 |
| VPO-11PM | 11 | 720 | 0.35 | DN100/DN65 |
| VPO-15PM | 15 | 894 | 0.35 | DN100/DN65 |
| VPO-18.5PM | 18.5 | 1050 | 0.35 | DN150/DN100 |
| VPO-22PM | 22 | 1290 | 0.35 | DN150/DN100 |
| VPO-30PM | 30 | 1620 | 0.35 | DN150/DN100 |
| VPO-37PM | 37 | 1800 | 0.35 | DN150/DN100 |
| VPO-45PM | 45 | 2622 | 0.35 | DN200/DN150 |
| VPO-55PM | 55 | 3709 | 0.35 | DN200/DN150 |
| VPO-75PM | 75 | 4244 | 0.35 | DN250/DN200 |
| VPO-90PM | 90 | 5167 | 0.35 | DN250/DN200 |
Oil-Free Screw Vacuum Pumps
| Model | Power (kW) | Flow (m³/h) | Ultimate Vacuum (kPa) | Inlet/Outlet |
|---|---|---|---|---|
| VPOF-5.5PM | 5.5 | 210 | 20–80 | DN65/DN50 |
| VPOF-7.5PM | 7.5 | 294 | 20–80 | DN65/DN50 |
| VPOF-11PM | 11 | 432 | 20–80 | DN80/DN65 |
| VPOF-15PM | 15 | 708 | 20–80 | DN80/DN65 |
| VPOF-18PM | 18 | 936 | 20–80 | DN100/DN80 |
| VPOF-22PM | 22 | 1092 | 20–80 | DN100/DN80 |
| VPOF-30PM | 30 | 1548 | 20–80 | DN150/DN100 |
| VPOF-37PM | 37 | 1758 | 20–80 | DN150/DN100 |
| VPOF-45PM | 45 | 2232 | 20–80 | DN150/DN125 |
| VPOF-55PM | 55 | 2766 | 20–80 | DN150/DN125 |
| VPOF-75PM | 75 | 3660 | 20–80 | DN200/DN150 |
| VPOF-90PM | 90 | 4560 | 20–80 | DN200/DN150 |
| VPOF-110PM | 110 | 5580 | 20–80 | DN250/DN200 |
Applications
Food Packaging | Chemical Processing | Electronics & Semiconductors | Automotive | Environmental Technology | General Industrial Vacuum
FAQ
Q: What is the difference between oil-injected and oil-free models?
A: Oil-injected pumps use oil for lubrication and sealing, delivering higher flow rates and deeper vacuum (0.35 mbar) – ideal for demanding industrial applications. Oil-free models provide clean, contamination-free vacuum (20–80 kPa) for sensitive processes like food, pharmaceutical, and semiconductor manufacturing.
Q: How much energy can I really save?
A: The smart control system adapts vacuum output to actual demand, reducing average energy consumption by up to 50% compared to conventional fixed-speed pumps. Efficiency reaches as high as 97.5%.
Q: What maintenance is required?
A: Oil-injected models feature a patented 3-stage oil separator that extends service life and simplifies maintenance. Both series are designed for easy access to core components, minimizing downtime and service costs.
Q: Are these pumps suitable for continuous 24/7 operation?
A: Yes. With oversized motor bearings, Class F insulation, heavy-duty airends, and variable-frequency cooling fans, all models are built for reliable, vibration-free round-the-clock performance.
Q: Can the pumps handle variable working conditions?
A: Absolutely. The intelligent variable-frequency drive automatically adjusts speed and power to match real-time vacuum demand, ensuring stable performance under fluctuating loads.
Q: Which industries are these pumps best suited for?
A: They are widely used in food packaging, chemical processing, electronics and semiconductors, automotive manufacturing, environmental technology, and general industrial vacuum systems.
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